2. Ultra-precision rotating reference space error self-separation method and device, patent (first inventor)
3. Single-index roundness error separation method, patent (first inventor)
4. Dual-function composite throttling hydrostatic gas cylindrical bearing, the first inventor of the patent)
5. Composite throttling hydrostatic gas cylindrical bearing, patent (first inventor)
6. Discrete herringbone groove dynamic and static pressure gas composite cylindrical bearing, patent (first inventor)
7. Hybrid spiral groove hydrostatic gas composite cylindrical bearing, patent (first inventor)
8. Laser transmission and reflection combined monitoring and compensation cylindricity linear motion reference device, patent (first inventor)
9. A cylindricity measuring method and device capable of separating the reference error of cylindricity meter, patent (first inventor)
10. Nano-precision micro-drive device and method based on magnetic-magnetic conversion, patent (first inventor)
1 1. Device and method for measuring microcavity size based on double optical fiber coupling, patent (first inventor)
12. dual optical fiber coupling contact micro-force aiming sensor, patent (first inventor)
13. Two-dimensional photoelectric autocollimator and measurement method based on dynamic differential compensation method, patent (first inventor)
14. Two-dimensional photoelectric autocollimator and measurement method based on optical path multiplication compensation method, patent (first inventor)
15. Long-distance two-dimensional photoelectric autocollimator and drift target feedback control method, patent (first inventor)
16. Long-distance two-dimensional polarized light electric autocollimation device and method with drift target feedback, patent (first inventor)
17. Spatial alignment method of ultra-precision rotating shaft and direct writing optical axis of laser direct writing machine, patent (first inventor)
18. Two-phase composite super-resolution pupil filtering method and device, patent (first inventor)
19. scanning microscopic detection method and device for three-dimensional super-resolution focal array, patent (first inventor)
20. Spherically symmetric gradient index microbead array reflector, patent (first inventor)
2 1. Maxwell micro-hemispherical array reflector, patent (first inventor)
22. Non-contact gas reversing valve with stepless opening adjustment, patent (first inventor)
23. Air spring vibration isolation foundation with electromagnetic damper, patent (first inventor)
24. Adjusting gasket with universal load distribution mechanism, patent (first inventor)
25. Multi-frequency synchronous modulation laser ranging method and device, patent (first inventor)
26. Method and device for reducing the first harmonic component of nonlinear error in heterodyne interference, patent (first inventor)
27. Electromagnetic shielding optical window with circular metal grid structure, patent (first inventor)
28. Polar direct writing method and device based on micro-optical array multi-point exposure, patent (first inventor)
29. Parallel laser direct writing method and device based on resonance method, patent (first inventor)
30. Method and device for frequency stabilization of dual longitudinal mode laser based on thermoelectric refrigerator, patent (first inventor)
3 1. Air spring vibration isolation foundation with magnetic suspension device, patent (first inventor)
32. Air spring vibration isolation foundation with gas lubrication device, patent (first inventor)
33. Achromatic method of refractive/diffractive hybrid telephoto depth imaging lens, patent (first inventor)
34. Method and device for measuring multi-color super-resolution differential focal length, patent (first inventor)
35. Reference method and device for single (double) airfoil gas/liquid two-phase composite rotation, patent (first inventor)
36. A method for separating a circular profile measurement model with double offset parameters and offset errors, Patent (First Inventor)
37. Electromagnetic shielding optical window with double-layer annular metal grid structure, patent (first inventor)
38. An electromagnetically shielded optical window with a double-layer grid structure, patent (first inventor)
39. Differential focusing scanning detection method with high spatial resolution, patent (second inventor)
40. Shaped annular beam differential focus sensor with high spatial resolution, patent (second inventor)
4 1. Three-difference focusing microscope with special-shaped ring light, patent (second inventor)
42. Three-dimensional differential focal microscopic super-resolution imaging method, patent (second inventor)
43. Three-difference * * focal microscopic imaging method and device, patent (second inventor)
44. High-precision laser collimation method and device for fast feedback control of beam drift, patent (second inventor)
45. One-line trigger analytical alignment method for polar coordinate laser direct writing system, patent (second inventor)