196 1 year, Willis whitefield, a senior researcher at Sandia national laboratory, put forward a clean airflow organization scheme called laminar flow at that time, and now it is called unidirectional flow, which has been applied in practical engineering. Since then, the clean room has reached an unprecedented higher cleanliness.
In the same year, the US Air Force formulated and issued the world's first clean room standard to-00-25-203 Air Force Directive "Standard for Design and Operation Characteristics of Clean Rooms and Clean Worktables". On this basis, 1963 65438+ announced in February that the clean room was divided into three levels.
Federal Standard Federal Reserve-Standard -209. At this point, the perfect prototype of clean room technology has been formed. These three key advances are usually regarded as three milestones in the history of modern clean room development.
In the mid-1960s, clean rooms mushroomed in various industrial sectors in the United States. It was used not only in military industry, but also in electronics, optics, micro-bearings, micro-motors, photographic films, ultra-pure chemical reagents and other industrial sectors, which was of great scientific significance at that time.
The development of technology and industry has played a great role in promoting.
In the early 1970s, the focus of clean room construction began to shift to medical, pharmaceutical, food and biochemical industries. In addition to the United States, other industrialized countries, such as Japan, Germany, Britain, France, Switzerland, the former Soviet Union, the Netherlands and so on. , but also attaches great importance to and vigorously develops clean technology.
The early 1960s was the initial stage of China's clean technology development, which was roughly ten years later than that of foreign countries. This is a very special and difficult period in China. On the one hand, just after three years of natural disasters, the economic foundation is weak. On the other hand, it has no direct contact with the advanced science and technology countries in the world, and cannot obtain the necessary scientific and technical data, information and samples. Under such difficult conditions, around the demand of precision machinery, aviation instruments and electronics industries, the clean technicians in China started their own entrepreneurial course.
The development of clean technology in China is divided into the following stages:
Start-up and basic stage
From the early 1960s to the late 1970s, this decade was the beginning and foundation stage of clean technology in China.
1965, the corrugated partition high-efficiency air filter jointly developed by Air Conditioning Research Institute of China Academy of Building Research and Bengbu Thermal Insulation Material Factory passed the appraisal, marking the official start of clean technology in China. There were two kinds of filter paper used at that time, one was blue stone.
The cotton fiber filter paper of GS series high efficiency air filter was quickly eliminated because the production process was not conducive to human health. The other is GB series high efficiency air filter, superfine glass fiber filter paper, which has been used ever since. It has been compared with similar products abroad for many times in China, and so has Minnie in the United States.
The test results of China HEPA filter paper by Aerosol Research Institute of Suda University prove that the main technical indexes of domestic HEPA filter paper have reached the international level in the same period.
It is worth mentioning that although Japan began to manufacture HEPA filters in Japan in cooperation with the United States in the late 1950s, and the cleaning technology started earlier, the technology and filter paper came from the United States, and the HEPA filters in Japan were not completely nationalized until 1969.
At the same time, 1963 successfully developed a sodium flame test-bed for filter materials, and 1964 built a sodium flame test-bed for high-efficiency filters. At this time, the normal production and quality of HEPA filter have been improved. China Academy of Medical Sciences Institute of Health, Tsinghua University Institute of Nuclear Energy and other units have made efforts to this end.
If HEPA filter is compared to the "heart" of cleaning technology, then detection technology and instruments are the eyes of cleaning technology, which can be used for identification and inspection. In the mid-1960s, the Institute of Health of China Academy of Medical Sciences, Harbin Institute of Architecture and Engineering,
Dandong Instrument Research Institute of China Academy of Sciences, Anhui Institute of Optics and Mechanics, Air Conditioning Institute and other units invested in the development of light scattering particle counters. 1973, the first domestic J-73 dust particle counter and monodisperse polystyrene latex standard particle (PSL) for calibrating the particle counter were successfully developed in three years. The average particle size range is 0. 177 ~ 1.460 μm, and the standard deviation is very small. 5%。 J-73 * * * has a granularity of 15, the measuring range is 0.3~ 10μm, and the sampling flow is 300ml/min. These two achievements passed the national appraisal in 1974 and were considered to have reached or approached the world level at that time. The popularization and application of dust particle counter has promoted the scientific research, design and purification equipment production of clean technology in China, and advanced along the road of self-reliance and self-improvement.
At the same time, some design institutes related to electronic technology, precision machinery and national defense industry are also exploring and studying the engineering design of clean rooms. 1 19 Factory and Shijiazhuang 13 Factory, which were built in 1965, were designed and built by the Fourth Research Institute of the Third Machinery Department (now the Fourth Design Institute of the Ministry of Aviation Industry) and the Second Design Institute of the Fourth Machinery Department (now the China Electronic Engineering Design Institute) with reference to the makeup grade of the former Soviet Union.
1966, the design institute of Chinese academy of sciences selected domestic GB series high efficiency air filters to design the precision machinery assembly workshop of Chinese academy of sciences, covering an area of 760 square meters, and it was put into operation in 1970. According to the measurement, under the static condition, when the indoor air exchange rate is 20AC/h, the indoor cleanliness reaches the 10000 level of the then American federal standard 209A.
At the beginning of 1973, the tenth design institute and the eleventh design institute of the fourth department of machinery began to design the clean workshops of the 878 factory and the 4433 factory respectively. The clean rooms in the two factories include air flow from 100,000 to100 of Fed-STD-209a.
There are vertical unidirectional flow, horizontal unidirectional flow and turbulence.
During this period, the purification equipment supporting the clean room has been successfully trial-produced, and some factories that used to produce special radio and semiconductor equipment and medical instruments have turned to produce purification equipment, forming the initial production scale and layout of clean room equipment in China. These factories are mainly located in Beijing, Tianjin, Suzhou, Shanghai and Chongqing. Starting with the design and manufacture of various clean worktables, the shower room, air lock room, material conveying window, residual pressure valve and other related equipment have been designed and manufactured successively.
In order to meet the needs of some scientific research institutions for small clean working environment in the late 1960s and early 1970s, and the needs of small clean rooms in some old factories, the air conditioning institute of the Ninth Research Institute of the Sixth Machinery Department (now the Ninth Design Institute of Shipbuilding Industry Corporation) was established.
No.3 Machinery Department, No.4 Hospital, Tianjin Medical Equipment Factory, Tianjin Medical Purification Equipment Factory and other units have successfully developed assembled vertical unidirectional flow and horizontal unidirectional flow clean rooms. This prefabricated clean room produced by the purification equipment factory is specially used for technical transformation of the original building.
When the required purification area is relatively small, the design and construction speed is fast and the technical performance is stable, and it passed the national appraisal in Tianjin on 1974.
Starting from 1974, the air-conditioning institute of the research institute, ten institutes of four mechanical departments and other units have established clean technology laboratories respectively, and carried out some basic research. For example, the Institute of Air Conditioning of the Research Institute of Architecture has calculated the uniform and uneven distribution of turbulent clean rooms in its laboratory.
Study on airflow characteristics of return air clean room with air supply on both sides of the whole ceiling. The 10th Design and Research Institute of the Fourth Ministry of Machinery has carried out experimental research on turbulent clean room, research on air distribution at the outlet of high efficiency filter and research on human dust.
Quantitative research and many other topics.
At the same time, some scientific research institutes and design institutes, such as No.7 Institute of Machinery (No.7 Institute of Aerospace Industry), Air Conditioning Institute of Research Institute, No.10 Institute of Machinery, No.11 Institute of Machinery, No.2 Institute of Machinery (No.2 Institute of Nuclear Industry) and No.9 Institute of Machinery, etc. And Tianjin University, Tongji University, Hebei Polytechnic University and other universities formed a clean room technology research collaboration group to cooperate with the national large-scale integrated circuit research. In order to standardize and improve China's clean technology level, for example, in Beijing, Xi, Shanghai and other places, long-term monitoring and statistical analysis of outdoor atmospheric dust concentration in different environments have been carried out, and the built clean rooms have been tested all over the country, and the experience of clean room design, construction, operation and equipment production has been summarized.
The development of clean technology abroad in the same period is as follows:
In the mid-1960s, cleanrooms in American electronics and precision machinery factories sprang up like mushrooms after rain, which greatly promoted the development of science and technology and industry at that time, and at the same time began to transplant industrial cleanroom technology (ICR).
BCR Tour-Biological Clean Room). In the early 1970s, the upsurge of clean room construction turned to medical, pharmaceutical, food and biochemical industries.
1966, the world's first BCOR (biological clean operating room) with vertical one-way flow was built in New Mexico, USA. In the same year, AACC (American Pollution Control Association, later merged into INTO Institute of Environmental Science and Technology) published such guiding documents as Design and Construction of Laminar Operating Room and Application of Laminar Clean Air in Surgery.
In the same year, the world's first horizontal laminar aseptic room was built in the University of Minnesota. 1967, the world's earliest biological clean leukemia room was built in M.D. Anderson Hospital, Texas, USA.
In Britain, D.J.Charnley, a famous plastic surgeon, also built a biological clean operating room named clean house in 1966. The first laminar flow ward in Europe was built in Leeds, Austria from 65438 to 0969.
Subsequently, Switzerland and Germany successively built biological clean rooms for medical use.
It is developing faster in Japan. 1965, the National Public Health Center of Japan built a biological clean room (BCR) equipped with high-efficiency filters for feeding sterile animals (SPF). 1970, an assembled vertical laminar leukemia room was built in Aichi workers' hospital.
1972, the vertical laminar aseptic operating room of National Osaka Hospital was built. By the end of 1977, there were 13 1 biological clean rooms in the hospital.
In order to ensure the safety and effectiveness of drugs, the US Food and Drug Administration (FDA) began to implement good manufacturing practice in the United States from 65438 to 0964. 1969, the World Health Organization (WH0) promulgated GMP, which stipulated the requirements for production environment and water quality in order to ensure the aseptic production of drugs. Bio-clean room technology has been widely used in pharmaceutical industry in the United States, Japan and Western Europe.
1969, the FDA of the United States promulgated the "food manufacturing standard", namely GMP, which requires strict control of microorganisms and temperature and humidity during manufacturing and packaging to prevent food from spoilage. Clean rooms for aseptic canned food were rapidly popularized in Europe and America at that time.
Take the United States as an example, the total amount of 197 1 year is 2.54 billion tons, and it has increased to132.7 billion tons in 1980, among which the growth rate of meat products is nearly 19 times. In the food brewing and fermentation industry, clean room technology is also used for purebred culture, inoculation and seed amplification.
For the electronics and semiconductor industries, which occupy about 70% of the clean room market, the 1970s is called LSI era, and the 1980s is called VLSI era. Since 1970, the integration of integrated circuits has developed at a rate of four times every two to three years.
At the end of 1970s, during the development of 64K-bit RAM as a landmark product in VLSI stage, people noticed that its typical line width was 3μm, and the minimum granularity needed to be controlled was 0.3 ~ 0.8 μ m ... That is to say, the HEPA filter based on 0.3μm efficiency could not adapt to the further development of electronic technology. The United States and Japan have successively developed and manufactured an ultra-high efficiency air filter-ULPA (Ultra-low Permeability Air Filter), and the filtration efficiency of dust particles of 0. 1μm is 99.99~99.995%.
Maturity and development stage
From the end of 1970s to the end of 1980s, China's clean technology experienced a sunny development stage. During the development of clean technology in China, many milestone achievements were almost born at this stage.
1, standards, specifications and international exchanges:
1979 1 Based on the experiment and experience summary of industrial clean rooms designed, researched and built by colleges and universities led by air conditioners, the Technical Measures for Air Cleanliness was published, which played an important role in the standardization and popularization of clean room technology in China at that time and laid the foundation for the formulation of national standards in the future.
1984, 1984 In February, 1984, the national standard GBJ73-84 "Code for Design of Clean Workshop" was issued and compiled by the Tenth Design Institute of the Ministry of Electronic Industry in conjunction with relevant units. Among them, the classification standard of cleanliness was equivalent to the American federal standard 209B recognized by most countries in the world at that time, which abandoned a number of clean room classification standards that China had used for reference in different ranges and was tailored for China.
Subsequently, combined with China's national conditions and referring to international standards, the performance test method, transmittance and resistance of GB6 166-85 high-efficiency filter materials, performance test method of GB6 167-85 dust particle counter, and inspection standard of GB6 168-85 laminar clean workbench were formulated successively.
It is worth mentioning that the national standard GB 122 18-89, which was finalized in June 1988+0 1, stipulates that the efficiency of coarse, medium and high efficiency air filters is measured by the finite diameter counting efficiency method of atmospheric dust, which is the practice of domestic scientific research units represented by Tianjin University for many years. 1993, the European Ventilation Association (ASHRAE) abandoned the original weighing efficiency method of atmospheric dust colorimetric efficiency method (ASHRAE AFI National Bureau of Statistics) and promulgated the diameter counting method using atmospheric dust or standard dust.
In particular, in June 1982, the Clean Technology Branch of the Chinese Institute of Electronics was established (the external name was "China Pollution Control Association" CCCS- China Pollution Control Society), and the magazine "Clean Technology" (now named "Clean and Air Conditioning Technology"-Pollution Control &: Air Conditioning Technology) was founded, which was officially published in 1983. 1986 China Clean Technology Society became a member of International Pollution Control Society (ICCS). At that time, the only member countries were the United States (IEST), Britain (see), France (ASPES), Germany (DIN/VDI), Japan (JACA), Italy (ASCCA), Switzerland (SRRT) and the four Nordic countries (R3-Nodic). (Now it has increased to 18 member countries, including Australia -—ACCS, Russia -—ASEMCO, Belgium -—BCW, North Korea -—KACA, Romania -—RACC, Brazil -—SBCC, Netherlands -—VCCN and Scotland -—SZCZ).
On 1998, the author, on behalf of China, was appointed as the executive chairman of the 9th ICCCS Los Angeles Conference and the 10th ICCCS Zurich Conference.
2, biological clean room technology:
China's biological clean room technology started more than ten years later than foreign countries. At the end of 1970s, some pharmaceutical companies reformed the original air-conditioning system, and began to use high-efficiency air filter as the end of air-conditioning air supply system to replace the original filter or glycerin gauze cover. During this period, Shanghai Pharmaceutical Industry Design Institute, Harbin Engineering University and related pharmaceutical factories successively adopted biological clean room technology in Shanghai No.4 and No.7 Pharmaceutical Factory and Zhenjiang Pharmaceutical Factory.
1982 China pharmaceutical industry co., ltd. has formulated the "pharmaceutical production management standard" (trial draft) according to the national conditions and foreign experience, in which the air cleanliness level refers to the American federal standard 209A, and the production environment is divided into control areas with a level greater than100000 and100000 and local areas with a level of100000. By the end of 1985, the Implementation Guide of good manufacturing practice was compiled and officially promulgated together with some revised Standards, which laid a foundation for promoting the modernization of the pharmaceutical industry. 1988 the Ministry of health issued the good manufacturing practice, the spirit of which is consistent with the above specifications, which prepares the conditions for the implementation of GMP certification in the pharmaceutical industry.
At present, biological clean room has been widely used in medical treatment. 1980 Heilongjiang hospital used a simple horizontal laminar air conditioning purification unit jointly developed by Harbin Institute of Architecture and Engineering and Jixi No.5 College. The assembled aseptic ward, which was jointly completed by the Sixth Hospital and Shanghai Jinshan Electronic Equipment Factory, was used in the cell laboratory of Shanghai Xinhua Hospital and Suzhou Medical College.
In the mid-1980s, the Design Institute of Barracks Department of the General Logistics Department and Tianjin University designed and built the operating building of 30 1 Hospital Rehabilitation Center, which has more than ten civil aseptic operating rooms with various air distribution forms, equivalent to the national aeronautics and space administration-5340Ⅱ standard. Tianjin University and Tianjin Purification Equipment Factory designed and built several 100-level assembled aseptic wards in the Institute of Hematology, China Academy of Medical Sciences.
In the early 1980s, the Academy of Military Medical Sciences, Institute of Air Conditioning, Bengbu Purification Equipment Factory and other units completed the development of II-A biosafety workstation (equivalent to P3). Harbin Institute of Civil Engineering and Architecture and other units.
The aseptic canning room for sweet torch milk, tomato sauce and bacon in Songjiang Canning Factory was built, which initiated the application of biosafety and food processing biotechnology in China.
1985 or so, JWL pinhole plankton sampler developed by Military Medical Research Institute and SS slit air plankton sampler jointly developed by Shanghai Quanxin Electronic Equipment Factory and Tongji University have passed the appraisal and are one of the technologies of biological clean room.
Research work provides the means.
3, basic and technical research:
During the 10 year from the end of 1970s to the end of 1980s, many achievements have been made in the basic and technical research of clean rooms, such as:
The statistical law of atmospheric dust in China, the influence of humidity on atmospheric dust concentration and the "W" type daily distribution model of atmospheric dust concentration are put forward, which provides a basis for determining outdoor design concentration.
The isolation effect, design principle and calculation method of laminar flow hood with air curtain are put forward
The theoretical calculation formula, empirical calculation formula, self-cleaning time and pollution time of turbulent clean room are put forward
The concepts and data of maximum room width, calculation model and lower wind speed of return air mode under unidirectional flow clean room are put forward.
The principle and scheme of double-ring sealing of high efficiency air filter combined with sealing and guiding are put forward, and the sealing scheme of pouring tank is put forward.
The number of bacteria in human body was detected and analyzed.
A test-bed for bacterial filtration efficiency of filter materials and filters was established, and the correlation between bacterial filtration efficiency and bacterial source counting and weighing efficiency of atmospheric dust was obtained.
China Institute of Building Research, No.10 Institute of No.4 Machinery Department, No.11 Institute, Design Institute, Tianjin University, Tsinghua University, Tongji University, Harbin Institute of Architecture and Engineering, Hebei University of Technology and other institutions have done a lot of work in this regard.
4. In product research and development:
From 1979 to 198 1, Tianjin University, Tianjin Meilun Fiber Factory, etc. Hundreds of kinds of materials (polyester, polypropylene, vinylon, cotton, wool, superfine glass fiber) were processed by needling, glue spraying, hot melting, melt blowing, hot pressing and rolling ...
198 1 year, WGP-0 1 mini-pleated HEPA filter was successfully developed by No.11 Institute of No.4 Machinery Department, Hebei Institute of Technology and No.2 Factory of Tianjin Radio Special Equipment, which filled the blank of domestic products.
1985, the 11th Hospital of the Fourth Mechanical Department, Sichuan Paper Industry Research Institute and Chongqing Radio Special Equipment Factory completed the development of the CGB high efficiency air filter. The counting efficiency of the filter for 0.65438 0 μ m dust particles is 99.99 ~ 99.995%, and the resistance is 245～270 pa. After identification, its main technical indicators reached ULPA produced in Japan at that time. 1987 65438+ 10. In October, the class 0. 1μm 10 clean room developed by Tianjin Pharmaceutical Purification Equipment Factory and Institute of Air Conditioning with foreign ULPA filter (product of Japanese Renzu Co., Ltd.) passed the appraisal. 1988 In May, the 11th Design Institute of the Ministry of Mechanical and Electrical Engineering and Chongqing Radio Special Equipment Factory passed the appraisal of domestic 0. 1μm high efficiency air filter, which mainly
This index has reached the technical level of foreign countries in 1980s.
In the same period, foreign clean room technology has been developing and progressing continuously.
In 1982, 16K bit random access memory (RAM) with about 50,000 to 60,000 devices per chip has become a best seller. 1984 256K bit RAM has entered the practical stage. At the beginning of the same year, Japan announced the successful trial production of one megabit DRAM (Dynamic Random Access Memory) with about 2 million devices per chip. 1985, the United States developed 4 trillion integrated circuits. By the end of 1980s, 4M-bit DRAM had been commercialized.
At this stage, various clean room airflow organization schemes and technologies that can reduce energy consumption and meet the requirements of process automation and high cleanliness have also emerged, such as tunnel clean room, pipeline clean room and SMIF (standard mechanical interface) technology.
Since the mid-1980s, the highest cleanliness level has been-100 (≥0.5μm, ≯ 100pc. /cu.ft) has been unable to meet the needs of microelectronics industry, 65438+ In fact, since the late 1970s, with the development of microelectronics technology, the United States and Japan have successively built higher-level clean rooms, and the corresponding detection instruments-laser particle counter and condensed nuclear particle counter (CNC) have also emerged. Summing up the experience in this period and meeting the needs of technological progress, the American federal standard 209C was issued on 1987 1 October 27th, which expanded the cleanliness level from the original level of 100 to 100000 to/kloc-0.
Connect with international standards and move towards standardization.
Since the early 1990s, with the rapid development of electronic technology, clean technology has been continuously improved. The following table shows the development process of international large-scale integrated circuits and domestic representative products.
In September 1 1, 1988, the American federal standard FED-STD-209E further replaced the FED-STD-209D promulgated in June 15438+05, changing the cleanliness grade from English to metric, and dividing the cleanliness grade into m/kloc-0. Compared with 209D, the highest level extends upwards by half a level (the dust particles in 209D 1 are ≥0.5μm ≯35.3pc./m3, while the dust particles in 209E1are ≥0.5μm ≯ 10pc). /m3)。
For more than 30 years, American Federal Standard 209 has been recognized as the industry standard of clean technology all over the world. GSA-U.S. General Services Administration, the authoritative unit that approved the American federal standards for use by federal government agencies, issued an announcement on 20011.29, abolishing FED-STD-209E, which is equivalent to adopting ISO- 14644 related standards. This decision marks a clean technology.
With the integration of the world economy, we will further move towards international harmony.
Since the early 1990s, China's economy has maintained steady and high-speed growth, international investment has been continuously injected, and a number of multinational groups have successively built many microelectronic factories in China. Therefore, domestic technicians and researchers have more opportunities to directly contact with the design principles of foreign advanced clean rooms and understand the international advanced equipment installation, management and maintenance. From this point of view, it is indeed more and more in line with international standards from all angles.
China has also invested a lot of money to develop microelectronics technology. At this stage, Shougang Nidian Company, Huajing Electronics Group Company, Shanghai Hua Hong NEC Electronics Company, Shaoxing Kazuki Watanabe musician Microelectronics Company, Tianjin Motorola Company, Shanghai Belling Microelectronics Company, etc. It has been built one after another, but generally speaking, there is still a considerable gap between microelectronics technology and the advanced production level in the world, especially the research and development level.
Since the early 1990s, pharmaceutical companies have promoted clean technology in the process of implementing GMP law, and thousands of pharmaceutical companies and non-pharmaceutical companies that produce pharmaceutical raw materials and packaging materials throughout the country have successively carried out technological transformation. Its scale and scope are unprecedented. 1992 China pharmaceutical industry company and China chemical pharmaceutical industry association revised the GMP implementation guide issued by 1985 and issued a new implementation guide. Subsequently, 1998 released the good manufacturing practice, which is in line with international standards and revised by National Medical Products Administration, namely China 1998 GMP (implemented from 1 August/September, 1999), further laying a foundation for the pharmaceutical industry to strengthen GMP implementation and implement the certification system. Since the early 1990s, the construction of aseptic operating rooms in hospitals has attracted attention from all sides. Thousands of bio-clean operating rooms, bio-clean wards and laboratory animal rooms with different levels from 10000 to100 have been built in major cities.
Summarizing the course of domestic clean technology industry in recent ten years, according to the author's personal point of view, it is mixed. It is gratifying that the clean room technology industry is increasingly in line with international standards in many aspects, which are reflected in the contents of relevant specifications, clean room design ideas and schemes, construction technology and management, testing methods and technologies. As reflected in the revision of China's national standards, GB 50073-20011national standard "Code for Design of Clean Rooms" released on October 3rd explicitly adopted the international standard ISO 65438 in the classification of air cleanliness. Driven by pharmaceutical industry and general electronic assembly industry, as well as medical and health, food and cosmetics industries, clean room technology has been greatly popularized. However, these industries are basically clean rooms of ISO5 or China standard N5 (equivalent to the original federal standard FED-STD-209E 100) and below, and the main equipment and equipment used, such as high-efficiency filters, shower rooms, purification benches, air-conditioning refrigeration units, metal siding and floor composite materials, are basically made in China. So since the 1970s, there are only a handful of them, mainly in Beijing, Tianjin and Shanghai. At the end of 1980s, there were more than 100 cleanroom equipment manufacturers and construction and installation units. Now there are thousands of cleanroom-related equipment manufacturers and equipment installation units in almost all provinces and cities in China, as well as a number of design units and debugging and testing units that have accumulated quite rich experience.
According to incomplete statistics and calculations, the area of clean rooms at all levels in operation in China has soared from 65,438+10,000 square meters in the early 1980s to more than 2 million square meters. The cleanliness level of workshops in some microelectronic factories has reached a high level of 0. 1 micron 1. In terms of theoretical calculation and experimental study of clean air flow pattern, Harbin Jianzhu University, Tianjin University, Institute of Air Conditioning of Jianyan Institute and other units adopted numerical simulation method and CFD (Computational Fluid Dynamics) combined with experimental verification to carry out research on the layout scheme and cleaning effect of sagittal flow pattern and high-efficiency filter vents in ordinary clean rooms, and participated in international academic exchanges of previous ICCCS, and published many research papers internationally.
Tianjin University and other units participated in the system debugging, testing and acceptance of clean rooms with different cleanliness levels designed and built by Motorola, SAE, KODA and CTS with foreign equipment and construction management technology. Deeply understand and master the design points, technical keys, debugging and acceptance technologies and corresponding specifications of advanced clean rooms in microelectronics and pharmaceutical industries abroad, and establish extensive contacts with Japanese FDA, NEBB, IEST and JACA.
Especially with the active efforts of the new clean technology branch of the Chinese Institute of Electronics, China successfully bid for the 18 International Pollution Control Conference (2006), which is the first time that ICCCS has held such a grand event in China since the establishment of 1972, and will play an important role in promoting the progress of clean technology in China.