Diamond like (diamond like? Carbon), referred to as DLC for short, has very similar properties to diamond because of its structure. As we all know, diamond is the most peculiar material among natural substances on the earth, which has several first properties, such as the highest hardness, reaching Hv 10000, which can be said to never wear; It has the highest thermal conductivity and can be used as the radiator with the highest heat dissipation efficiency; Good light transmission, so it can be used as jewelry and various lenses; Low friction coefficient, which can be used in the field of friction and wear. However, due to the scarcity of natural diamonds, it is impossible to synthesize them artificially.

Large area of diamonds, and the cost is very high. Therefore, the application of diamond is limited. Diamond-like carbon can be synthesized in a large area at low cost, so it is expected to be widely used in industry.

An equipment for depositing diamond-like carbon films is introduced.